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Water Vapour Cryopumps

New more compact, single stage water vapour cryopumps are based on the 1.5 to 18w Stirling cryocoolers at 120k. Paired in– line with the more compact turbo pumps with pumping speeds in the 70 to 12,000 L/s range, they provide up to 50% faster pump down times, not achievable with turbo pumps alone to reach HV/UHV vacuum levels. Our cryo–water pump can also be applied in an in-situ configuration as well. In regeneration mode, the Cryo-water pump is controlled via PC interface and can be turned off or idled during regeneration and/or assisted with a built in heating element.

Microstar Brochure 1.pdf

Microstar Brochure 2.pdf